Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497591 | Load lock chamber and the cluster tool system using the same | Ren Zhou, Brian Lu, Sean Chang, Shicai Fang, Jie Lian +1 more | 2019-12-03 |
| 10410909 | Waffer pedestal and support structure thereof | Ren Zhou, Shichai Fang | 2019-09-10 |