Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497591 | Load lock chamber and the cluster tool system using the same | Ren Zhou, Xuyen Pham, Brian Lu, Shicai Fang, Jie Lian +1 more | 2019-12-03 |
| 10177019 | Vacuum-assisted vessel environmental contaminant purging | YongHwan Keam, Marc McClendon, Jaison Roy, Qasim Jawad, Matt Gonzales +1 more | 2019-01-08 |