Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488180 | Mask inspection apparatus and mask inspection method | Yasuhiro Yamashita | 2019-11-26 |
| 10444487 | Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method | — | 2019-10-15 |
| 10410335 | Inspection method and inspection apparatus | Masatoshi Hirono | 2019-09-10 |
| 10401299 | Image capturing apparatus and inspection apparatus and inspection method | — | 2019-09-03 |
| 10386308 | Pattern inspection apparatus for detecting a pattern defect | Toshiaki OTAKI | 2019-08-20 |
| 10359370 | Template substrate for use in adjusting focus offset for defect detection | Hideo Tsuchiya | 2019-07-23 |
| 10282635 | Pattern inspection apparatus | — | 2019-05-07 |
| 10222341 | Focusing apparatus, focusing method, and pattern inspection method | Toshiaki OTAKI | 2019-03-05 |
| 10197507 | Inspection apparatus | Hiromu Inoue, Masatoshi Hirono | 2019-02-05 |
| 10192304 | Method for measuring pattern width deviation, and pattern inspection apparatus | Kazuhiko Inoue | 2019-01-29 |