Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386308 | Pattern inspection apparatus for detecting a pattern defect | Riki Ogawa | 2019-08-20 |
| 10222341 | Focusing apparatus, focusing method, and pattern inspection method | Riki Ogawa | 2019-03-05 |