Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504219 | Inspection apparatus and inspection method | Nobutaka Kikuiri | 2019-12-10 |
| 10410824 | Electron beam inspection apparatus and electron beam inspection method | — | 2019-09-10 |
| 10359370 | Template substrate for use in adjusting focus offset for defect detection | Riki Ogawa | 2019-07-23 |