Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10322926 | MEMS device with reduced dynamic stress and methods | Sudheer S. Sridharamurthy, Te-Hsi Lee | 2019-06-18 |
| 10267636 | Method to test the quality factor of a MEMS gyroscope at chip probe | Sudheer S. Sridharamurthy, Tony Maraldo, Zheng-Yao Sun, Te-Hsi Lee, Sanjay Bhandari +1 more | 2019-04-23 |
| 10183860 | Method to package multiple mems sensors and actuators at different gases and cavity pressures | Shingo Yoneoka | 2019-01-22 |