Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10343896 | Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures | — | 2019-07-09 |
| 10322926 | MEMS device with reduced dynamic stress and methods | Sudheer S. Sridharamurthy, Wenhua Zhang | 2019-06-18 |
| 10267636 | Method to test the quality factor of a MEMS gyroscope at chip probe | Sudheer S. Sridharamurthy, Tony Maraldo, Zheng-Yao Sun, Wenhua Zhang, Sanjay Bhandari +1 more | 2019-04-23 |