Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361097 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2019-07-23 |
| 10184193 | Epitaxy reactor and susceptor system for improved epitaxial wafer flatness | — | 2019-01-22 |