Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508221 | Aqueous low abrasive silica slurry and amine carboxylic acid compositions for use in shallow trench isolation and methods of making and using them | Yi Guo, Naresh Kumar Penta | 2019-12-17 |
| 10316218 | Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them | Naresh Kumar Penta, Julia Kozhukh, Kancharla-Arun Kumar Reddy, Matthew Van Hanehem | 2019-06-11 |
| 10221336 | Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them | Julia Kozhukh, Naresh Kumar Penta, Matthew Van Hanehem, Kancharla-Arun Kumar Reddy | 2019-03-05 |