Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Mohsen Salek, Richard H. Gould, Efrain Quiles | 2019-12-24 |
| 10509052 | Smart vibration wafer with optional integration with semiconductor processing tool | Peter Thaulad, Arulselvam Simon Jeyapalan, Tyson Ringold, Victor Eduardo Espinosa, III | 2019-12-17 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Mark Tan, Christopher W. Burkhart, Richard H. Gould | 2019-11-19 |