Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Mohsen Salek, Richard M. Blank, Efrain Quiles | 2019-12-24 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Mark Tan, Christopher W. Burkhart, Richard M. Blank | 2019-11-19 |
| 10304707 | Load lock interface and integrated post-processing module | David Trussell, John Daugherty | 2019-05-28 |
| 10297480 | Buffer station with single exit-flow direction | Martin Robert Maraschin, Derek John Witkowicki | 2019-05-21 |
| 10249521 | Wet-dry integrated wafer processing system | Thorsten Lill, Andreas Fischer, Michael Myslovaty, Philipp Engesser, Harald Okorn-Schmidt +1 more | 2019-04-02 |