Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403476 | Active showerhead | Mariusch Gregor, Thorsten Lill | 2019-09-03 |
| 10304707 | Load lock interface and integrated post-processing module | Richard H. Gould, John Daugherty | 2019-05-28 |