Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428807 | Pump power consumption enhancement | Kenneth Le | 2019-10-01 |
| 10403476 | Active showerhead | Thorsten Lill, David Trussell | 2019-09-03 |
| 10222810 | Methods for monitoring a flow controller coupled to a process chamber | Balarabe Mohammed, John W. Lane, Dan Joseph Healy | 2019-03-05 |