Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453735 | Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium | Hidenari Yoshida, Shuhei Saido, Takafumi Sasaki | 2019-10-22 |
| D855027 | Cover of seal cap for reaction chamber of semiconductor | Shuhei Saido, Hidenari Yoshida | 2019-07-30 |
| D853979 | Reaction tube | Toru Kagaya, Shinya Ebata, Hiroaki Hiramatsu | 2019-07-16 |
| D847105 | Boat of substrate processing apparatus | Hidenari Yoshida | 2019-04-30 |
| D846514 | Boat of substrate processing apparatus | Hidenari Yoshida | 2019-04-23 |
| D843958 | Reaction tube | Hidenari Yoshida, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-26 |
| D842823 | Reaction tube | Hidenari Yoshida, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-12 |