Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453735 | Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2019-10-22 |
| D855027 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Shuhei Saido | 2019-07-30 |
| D847105 | Boat of substrate processing apparatus | Yusaku OKAJIMA | 2019-04-30 |
| D847301 | Return nozzle | Takafumi Sasaki, Shuhei Saido | 2019-04-30 |
| D846514 | Boat of substrate processing apparatus | Yusaku OKAJIMA | 2019-04-23 |
| D843958 | Reaction tube | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-26 |
| D842823 | Reaction tube | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-12 |
| D839219 | Boat for substrate processing apparatus | Toru Kagaya, Atsushi Hirano | 2019-01-29 |