Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388512 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Takafumi Sasaki, Tsukasa Kamakura | 2019-08-20 |
| D853979 | Reaction tube | Toru Kagaya, Shinya Ebata, Yusaku OKAJIMA | 2019-07-16 |