Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453729 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Shinsuke Kimura | 2019-10-22 |
| 10290490 | Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device | Tomohiko Sugita, Yoshihiro Ogawa | 2019-05-14 |
| 10199209 | Substrate treatment apparatus and substrate treatment method | Tomohiko Sugita, Katsuhiro Sato, Yoshihiro Ogawa | 2019-02-05 |