Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290490 | Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device | Hiroyasu Iimori, Yoshihiro Ogawa | 2019-05-14 |
| 10199209 | Substrate treatment apparatus and substrate treatment method | Katsuhiro Sato, Hiroyasu Iimori, Yoshihiro Ogawa | 2019-02-05 |