Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453729 | Substrate treatment apparatus and substrate treatment method | Hiroyasu Iimori, Shinsuke Kimura | 2019-10-22 |
| 10290491 | Substrate treatment apparatus and substrate treatment method | Shinsuke Kimura, Yoshihiro Ogawa | 2019-05-14 |