Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520814 | Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate | Masayuki Miyake, Tsubasa Abe, Kazunori Takanashi, Kazunori Sakai | 2019-12-31 |
| 10423083 | Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate | Kentaro Harada | 2019-09-24 |