Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423083 | Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate | Goji Wakamatsu | 2019-09-24 |
| 10319571 | Ruthenium sputtering target and ruthenium alloy sputtering target | — | 2019-06-11 |