Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520814 | Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate | Goji Wakamatsu, Tsubasa Abe, Kazunori Takanashi, Kazunori Sakai | 2019-12-31 |
| 10473357 | Coating booth and flow-straightening device | Yoshifumi TAKAGI, Takashi Hashimoto | 2019-11-12 |