Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444624 | Active metrology frame and thermal frame temperature control in imprint lithography | Byung-Jin Choi, Steven L. Hartmann | 2019-10-15 |
| 10409178 | Alignment control in nanoimprint lithography based on real-time system identification | Byung-Jin Choi | 2019-09-10 |
| 10335984 | Imprint apparatus and article manufacturing method | Byung-Jin Choi, Anshuman Cherala, Zhengmao Ye, Kang Luo, Nobuto Kawahara +1 more | 2019-07-02 |
| 10248018 | Imprint apparatus and method of manufacturing article | Philip D. Schumaker, Wei Zhang, Atsushi Kimura, Jun Ota | 2019-04-02 |
| 10199244 | Imprint apparatus, and method of manufacturing article | Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi +1 more | 2019-02-05 |