Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416576 | Optical system for use in stage control | Seth J. Bamesberger, Yeshwanth Srinivasan | 2019-09-17 |
| 10248018 | Imprint apparatus and method of manufacturing article | Xiaoming Lu, Wei Zhang, Atsushi Kimura, Jun Ota | 2019-04-02 |