XL

Xiaoming Lu

Canon: 5 patents #208 of 4,196Top 5%
Overall (2019): #28,243 of 560,194Top 6%
5
Patents 2019

Issued Patents 2019

Patent #TitleCo-InventorsDate
10444624 Active metrology frame and thermal frame temperature control in imprint lithography Byung-Jin Choi, Steven L. Hartmann 2019-10-15
10409178 Alignment control in nanoimprint lithography based on real-time system identification Byung-Jin Choi 2019-09-10
10335984 Imprint apparatus and article manufacturing method Byung-Jin Choi, Anshuman Cherala, Zhengmao Ye, Kang Luo, Nobuto Kawahara +1 more 2019-07-02
10248018 Imprint apparatus and method of manufacturing article Philip D. Schumaker, Wei Zhang, Atsushi Kimura, Jun Ota 2019-04-02
10199244 Imprint apparatus, and method of manufacturing article Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi +1 more 2019-02-05