Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10492868 | Method and apparatus for image-based navigation | Bruce M. Burg, Andrew Bzostek, Brad Jacobsen, Matthew W. Koenig | 2019-12-03 |
| 10444624 | Active metrology frame and thermal frame temperature control in imprint lithography | Xiaoming Lu, Byung-Jin Choi | 2019-10-15 |
| 10191615 | Method and apparatus for image-based navigation | Patrick A. Helm, Andrew Bzostek, James Dustin Duckett, Robert Teichman, David E. Macht | 2019-01-29 |