Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416566 | Optimization of source and bandwidth for new and existing patterning devices | Wei-An Hsieh, Tsann-Bim Chiou, Cheng-Hsien Hsieh | 2019-09-17 |
| 10268123 | Wafer-based light source parameter control | Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner | 2019-04-23 |