Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345714 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Abhishek Subramanian, Thomas Patrick Duffey | 2019-07-09 |
| 10268123 | Wafer-based light source parameter control | Eric Anders Mason, Gregory Allen Rechtsteiner, Willard E. Conley | 2019-04-23 |