Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365225 | Multi-location metrology | Stilian Ivanov Pandev | 2019-07-30 |
| 10210606 | Signal response metrology for image based and scatterometry overlay measurements | Stilian Ivanov Pandev, Dzmitry Sanko, Siddharth Srivastava | 2019-02-19 |