Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451890 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King | 2019-10-22 |
| 10345714 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian | 2019-07-09 |
| 10288484 | Homogenization of light beam for spectral feature metrology | Zhongquan Zhao, Brian Edward King | 2019-05-14 |
| 10267687 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski | 2019-04-23 |
| 10228322 | Apparatus for and method of sensing fluorine concentration | — | 2019-03-12 |