Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483102 | Surface modification to improve amorphous silicon gapfill | Pramit Manna, Abhijit Basu Mallick | 2019-11-19 |
| 10460933 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2019-10-29 |