Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510575 | Substrate support with multiple embedded electrodes | Thai Cheng Chua, Jaeyong Cho | 2019-12-17 |
| 10504699 | Phased array modular high-frequency source | Thai Cheng Chua, Christian Amormino, Dmitry A. Dzilno | 2019-12-10 |
| 10373804 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Leonid Dorf, Prabu Gopalraja | 2019-08-06 |
| 10312048 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Rajinder Dhindsa +1 more | 2019-06-04 |