Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242888 | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2019-03-26 |