Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung, Steven Lane +2 more | 2019-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung, Steven Lane +2 more | 2019-04-02 |