IB

Ilya Bezel

KL Kla-Tencor: 9 patents #7 of 446Top 2%
Overall (2019): #11,173 of 560,194Top 2%
9
Patents 2019

Issued Patents 2019

Patent #TitleCo-InventorsDate
10522340 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Matthew Panzer 2019-12-31
10520741 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Matthew Panzer, Eugene Shifrin 2019-12-31
10495287 Nanocrystal-based light source for sample characterization Lauren Wilson, Joshua Wittenberg, Matthew Derstine 2019-12-03
10381216 Continuous-wave laser-sustained plasma illumination source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer 2019-08-13
10283342 Laser sustained plasma light source with graded absorption features Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more 2019-05-07
10257918 System and method for laser-sustained plasma illumination Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav +2 more 2019-04-09
10244613 System and method for electrodeless plasma ignition in laser-sustained plasma light source Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Erik Kim, Rajeev Patil 2019-03-26
10217625 Continuous-wave laser-sustained plasma illumination source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer 2019-02-26
10203247 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more 2019-02-12