Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504762 | Bridging front opening unified pod (FOUP) | Karrthik Parathithasan, Fang Jie Lim, Sriskantharajah Thirunavukarasu | 2019-12-10 |
| 10465288 | Nozzle for uniform plasma processing | Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Cheng Sun | 2019-11-05 |
| 10446423 | Next generation warpage measurement system | Jun-Liang Su, Karthik Elumalai, Sriskantharajah Thirunavukarasu, Dimantha Rajapaksa | 2019-10-15 |
| 10347516 | Substrate transfer chamber | Sriskantharajah Thirunavukarasu, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh | 2019-07-09 |
| 10325790 | Methods and apparatus for correcting substrate deformity | Sriskantharajah Thirunavukarasu, Jun-Liang Su, Shoju Vayyapron, Karthik Elumalai, Dimantha Rajapaksa +1 more | 2019-06-18 |