Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347516 | Substrate transfer chamber | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh | 2019-07-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347516 | Substrate transfer chamber | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Ellie Yieh | 2019-07-09 |