Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465288 | Nozzle for uniform plasma processing | Rohit Mishra, Siva Suri Chandra Rao Bhesetti, Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Cheng Sun | 2019-11-05 |
| 10325790 | Methods and apparatus for correcting substrate deformity | Eng Sheng Peh, Sriskantharajah Thirunavukarasu, Jun-Liang Su, Karthik Elumalai, Dimantha Rajapaksa +1 more | 2019-06-18 |