Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199256 | Methods and systems for improved mask processing | Edward Ng, Jeffrey C. Hudgens, Sushant S. Koshti | 2019-02-05 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, John C. Menk, Helder Lee, Sangram Patil +3 more | 2019-01-29 |