Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459338 | Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging | Paul A. Nyhus, Eungnak Han, Swaminathan Sivakumar | 2019-10-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459338 | Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging | Paul A. Nyhus, Eungnak Han, Swaminathan Sivakumar | 2019-10-29 |