Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522329 | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Elmar Platzgummer, Christoph Spengler | 2019-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522329 | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Elmar Platzgummer, Christoph Spengler | 2019-12-31 |