Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522329 | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Elmar Platzgummer, Wolf Naetar | 2019-12-31 |
| 10325757 | Advanced dose-level quantization of multibeam-writers | Elmar Platzgummer, Hanns Peter Petsch | 2019-06-18 |