Issued Patents 2019
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217868 | Airgap spacers | Kangguo Cheng, Zuoguang Liu | 2019-02-26 |
| 10170588 | Method of forming vertical transport fin field effect transistor with high-K dielectric feature uniformity | Tenko Yamashita, Chen Zhang | 2019-01-01 |