Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481484 | Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue | 2019-11-19 |
| 10429728 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa | 2019-10-01 |
| 10347485 | Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device | Tatsuo Asakawa, Hirofumi Kozakai | 2019-07-09 |
| 10295900 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa | 2019-05-21 |
| 10191365 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa | 2019-01-29 |