Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429728 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-10-01 |
| 10394113 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2019-08-27 |
| 10295900 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-05-21 |
| 10209614 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2019-02-19 |
| 10191365 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2019-01-29 |
| 10175394 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Toshihiko Orihara | 2019-01-08 |