Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347485 | Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device | Tsutomu Shoki, Hirofumi Kozakai | 2019-07-09 |
| 10191365 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2019-01-29 |