Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481485 | Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2019-11-19 |
| 10481486 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2019-11-19 |