Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481486 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2019-11-19 |
| 10444620 | Mask blank, phase-shift mask and method for manufacturing semiconductor device | Atsushi Matsumoto, Takashi Uchida | 2019-10-15 |
| 10365555 | Mask blank, transfer mask and methods of manufacturing the same | Osamu Nozawa, Ryo Ohkubo | 2019-07-30 |
| 10365556 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2019-07-30 |
| 10261409 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2019-04-16 |
| 10180622 | Mask blank, phase-shift mask, method of manufacturing mask blank, method of manufacturing phase-shift mask and method of manufacturing semiconductor device | Kazuya Sakai | 2019-01-15 |