Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481485 | Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo | 2019-11-19 |
| 10481486 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Hiroaki Shishido | 2019-11-19 |
| 10365555 | Mask blank, transfer mask and methods of manufacturing the same | Hiroaki Shishido, Ryo Ohkubo | 2019-07-30 |
| 10365556 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2019-07-30 |
| 10261409 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2019-04-16 |