Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229813 | Plasma processing apparatus with lattice-like faraday shields | Tadayoshi Kawaguchi, Ryoji Nishio | 2019-03-12 |
| 10217613 | Plasma processing apparatus | Tetsuo Kawanabe, Takumi Tandou, Naoki Yasui | 2019-02-26 |